English Explanatory Dictionary

TDMAGe

English dictionary entry

Meanings

noun
  1. Tetrakis(dimethylamino)germanium, a metalorganic source for germanium nitride (GeN) in MOCVD of semiconductors. It grows GeN instead of Ge, and is used at either high temperatures (600-800 C) or with plasma because of its very low vapor pressure and higher decomposition temperature.

Word forms

TDMAGe
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